Computer Science | Physics Internship: application development for scanner performance

Introduction

The System Performance DUV is part of Performance & Integration cluster in Development & Engineering department. Our mission is to predict and optimize scanner performance by combining experimental results with simulations based on detailed module data. Within the Imaging competence, we focus on understanding the fundamental principles of our lithographic systems. This includes analyzing how key components — such as aberrations, focus, dose, illumination, dynamics, and more — contribute to imaging performance. We use these insights to build models that predict complete system behavior.

Your Assignment

We are building an automated data‑processing pipeline that converts raw scanner sensor data into performance predictions for imaging. Today this workflow involves multiple extraction and conversion steps that are time‑consuming and not fully standardized. Our goal is to bring all imaging‑related data analysis into a single, rob...